Precision tools for inspecting semiconductors, PCBs and more 

The phoenix microme|x neo and nanome|x neo provide high-resolution 2D X-ray technology and 3D computed tomography( CT) scanning in one system, enabling non-destructive testing (NDT) of electronic components – such as semiconductors, PCBs, lithium-ion batteries -- in industrial, automotive, aviation and consumer electronics industries. With innovative engineering coupled with ultra-high positioning accuracy, phoenix microme|x neo and nanome|x neo are ideally suited for industrial X-ray electronics inspections in process and quality control, failure analysis and R&D.

Unique features

→ Automated inspection in micrometer range with easy to program CAD based μAXI
→ Active cooling for high dynamic, live imaging at 180 kV configurations
→ Brilliant live imaging and fast data acquisition for 3D CT / planarCT scanning with:
→ 30 frames per second with Waygate Technologies’ highly dynamic DXR flat panel detector
→ Up to 2 times faster data acquisition at same high image quality level with diamond|window
→ Option provided for 3D CT scans within up to 10 seconds

Industry-leading detail detectability speed & image quality

→ Brilliant live inspection images with high dynamic Waygate Technologies DXR digital detector array
→ Large 27” monitor and ultra-high defect coverage and repeatability
→ Detail detectability at 0.5 µm or 0.2 µm with nanofocus
→ Live overlay of CAD and inspection results even in rotated oblique inspection views
→ High power 180 kV / 20 W micro- or nanofocus tube for high absorbing electronic samples

Efficient and transportable for in-field use

→ Minimized setup time due to highly efficient automated CAD programming
→ Designed for portability with compact, state-of-the-art electronics
→ Intuitive GUI interface with fully automated inspection program generation

Options for optimization and 3D scanning

→ Optional FLASH!™ image optimization technology
→ Optional advanced failure analysis with high resolution 3D micro- or nanoCT® or large board planarCT
→ Optional 3D CT scans up to 10 seconds

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